年度 2013
全部作者 Jen-Ching Huang, Huail-Siang Liu, Cheng-Shuo Xue, Gui-Jia Zhang, Xin-Ming Zhan
論文名稱 The Study on the Fabrication of Nanostructure and Nanomold by Nano-oxidation and Hydrofluoric Acid Etching on TiAlN Thin Film
期刊名稱 Journal of the Chinese Society of Mechanical Engineers
卷數 34
期數 4
論文類型 SCI
發表日期 2013-08-01
檔案
  • 04-The Study on the Fabrication of Nanostructure and Nanomold by Nano-oxidation and Hydrofluoric Acid Etching on TiAlN Thin Film-353-359JCMES.pdf