| 年度 | 2007 |
|---|---|
| 全部作者 | Ship-Peng Lo. Yeou-Yih Lin and Jen-Ching Huang |
| 論文名稱 | Analysis of Retaining Ring using Finite Element Simulation in Chemical Mechanical Polishing Process |
| 期刊名稱 | International Journal of Advanced Manufacturing Technology |
| 卷數 | 34 |
| 論文類型 | SCI |
| 發表日期 | 2007-07-01 |
| 檔案 |